A BATH AND METHOD FOR FILLING A VERTICAL INTERCONNECT ACCESS OR TRENCH OF A WORK PIECE WITH NICKEL OR A NICKEL ALLOY

An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising - a source of nickel ions, and optionally a source of ions of at least one alloying metal, - at least one buffering agent, - at least one of a dimer of a compound o...

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Main Authors SPERLING, Jan, CASTELLANI, Mauro, VAZHENIN, Grigory, ROHDE, Dirk, GAIDA, Josef, ACKERMANN, Stefanie, BRUNNER, Heiko
Format Patent
LanguageEnglish
Published 25.06.2020
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Summary:An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising - a source of nickel ions, and optionally a source of ions of at least one alloying metal, - at least one buffering agent, - at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R 1 is a substituted or unsubstituted alkenyl group, R 2 may be present or not, and if present R 2 is a -(CH 2 ) n -SO 3 - group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
Bibliography:Application Number: US201816635568