A BATH AND METHOD FOR FILLING A VERTICAL INTERCONNECT ACCESS OR TRENCH OF A WORK PIECE WITH NICKEL OR A NICKEL ALLOY
An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising - a source of nickel ions, and optionally a source of ions of at least one alloying metal, - at least one buffering agent, - at least one of a dimer of a compound o...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
25.06.2020
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Subjects | |
Online Access | Get full text |
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Summary: | An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising
- a source of nickel ions, and optionally a source of ions of at least one alloying metal,
- at least one buffering agent,
- at least one of a dimer of a compound of formula (I) or mixtures thereof
wherein
R 1 is a substituted or unsubstituted alkenyl group,
R 2 may be present or not, and if present R 2 is a -(CH 2 ) n -SO 3 - group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and
a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath. |
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Bibliography: | Application Number: US201816635568 |