Integrated Assemblies Having Charge-Trapping Material Arranged in Vertically-Spaced Segments, and Methods of Forming Integrated Assemblies

• Main Authors: Kim, Woohee, Kim, Changhan, Hopkins, John D
• Format: Patent
• Language: English
• Published: 11.06.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels include conductive wordline material having terminal ends. Charge blocking material is along the terminal ends of the conductive wordline material and has first vertical faces. The insulative levels have terminal ends with second vertical faces. The second vertical faces are laterally offset relative to the first vertical faces. Charge-trapping material is along the first vertical faces, and extends partially along the second vertical faces. The charge-trapping material is configured as segments which are vertically spaced from one another by gaps. Charge-tunneling material extends along the segments of the charge-trapping material. Channel material extends vertically along the stack, and is spaced from the charge-trapping material by the charge-tunneling material. The channel material extends into the gaps. Some embodiments include methods of forming integrated assemblies.