Method for of Measuring a Focus Parameter Relating to a Structure Formed Using a Lithographic Process

Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus...

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Main Authors LI, Fahong, SOKOLOV, Sergei
Format Patent
LanguageEnglish
Published 28.05.2020
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Abstract Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus parameter based on the measurement data.
AbstractList Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus parameter based on the measurement data.
Author SOKOLOV, Sergei
LI, Fahong
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Snippet Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The...
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SubjectTerms MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Title Method for of Measuring a Focus Parameter Relating to a Structure Formed Using a Lithographic Process
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