Method for of Measuring a Focus Parameter Relating to a Structure Formed Using a Lithographic Process
Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
28.05.2020
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus parameter based on the measurement data. |
---|---|
Bibliography: | Application Number: US201916693453 |