ETCHING COMPOSITION, METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING A DISPLAY DEVICE USING THE SAME

An etching composition includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a sulfate compound and water.

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Bibliographic Details
Main Authors SHIN, Hyun-Cheol, LEE, Dae-Woo, KIM, Gyu-Po, PARK, Jonghee, KIM, Jinseock, HONG, Zheng, KIM, Kitae, LEE, Sang-Hyuk
Format Patent
LanguageEnglish
Published 14.05.2020
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Summary:An etching composition includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a sulfate compound and water.
Bibliography:Application Number: US201916579073