LDMOS FIN-TYPE FIELD-EFFECT TRANSISTORS INCLUDING A DUMMY GATE
Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a laterally-diffused metal-oxide-semiconductor device. A fin projects from a substrate, a channel region and a drain extension are arranged in a first section of the fin and the substrate beneath the first se...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
30.04.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a laterally-diffused metal-oxide-semiconductor device. A fin projects from a substrate, a channel region and a drain extension are arranged in a first section of the fin and the substrate beneath the first section of the fin, a source region is arranged in the first section of the fin, a drain region is arranged in a second section of the fin and the substrate beneath the second section of the fin, and a gate structure is arranged over the channel region. The drain region and the source region have an opposite conductivity type from the channel region. A trench isolation region is arranged in the fin between the first section of the fin and the second section of the fin. A dummy gate is arranged over a portion of the second section of the fin. |
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Bibliography: | Application Number: US201816172109 |