OPTICAL DEVICE

An optical device includes: a base which includes a main surface; a movable mirror which includes a mirror surface; a first and a second elastic support portions which support the movable mirror so as to be movable along a first direction perpendicular to the main surface; an actuator which moves th...

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Bibliographic Details
Main Authors SUZUKI, Tomofumi, KOTANI, Kyosuke, SUGIMOTO, Tatsuya
Format Patent
LanguageEnglish
Published 23.04.2020
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:An optical device includes: a base which includes a main surface; a movable mirror which includes a mirror surface; a first and a second elastic support portions which support the movable mirror so as to be movable along a first direction perpendicular to the main surface; an actuator which moves the movable mirror; and a first optical function portion which is disposed at one side of the movable mirror in a second direction perpendicular to the first direction. The first elastic support portion includes a pair of first levers extending from the movable mirror toward both sides of the first optical function portion in a third direction perpendicular to the first and the second directions. A length of each of first levers in the second direction is larger than the shortest distance between an outer edge of the mirror surface and an edge of the first optical function portion.
Bibliography:Application Number: US201816625688