SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device includes a substrate. The semiconductor device further includes a wiring layer provided on the substrate, the wiring layer including a molybdenum layer including oxygen atoms as an impurity.
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
19.03.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device includes a substrate. The semiconductor device further includes a wiring layer provided on the substrate, the wiring layer including a molybdenum layer including oxygen atoms as an impurity. |
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Bibliography: | Application Number: US201916280003 |