Semiconductor Structures Which Include Laminates of First and Second Regions, and Methods of Forming Semiconductor Structures

• Main Authors: Nahar, Manuj, Fan, Darwin Franseda
• Format: Patent
• Language: English
• Published: 27.02.2020
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CRYSTAL GROWTH; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

Some embodiments include a semiconductor structure having a laminate which has first regions alternating with second regions. The first regions include silicon, and the second regions include germanium. Some embodiments include a method of forming a semiconductor structure. The semiconductor structure may correspond to at least a portion of an active region of a transistor. A first semiconductor material is deposited with a first deposition process. The first semiconductor material includes silicon. The first deposition process is intermittently interrupted to etch a surface of the deposited first semiconductor material and to deposit a second semiconductor material with a second deposition process. The second semiconductor material includes germanium. The semiconductor structure is at least partially crystalline.