LIGHT GENERATION SYSTEM USING METAL-NONMETAL COMPOUND AS PRECURSOR AND RELATED LIGHT GENERATION METHOD

A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device is configured to vaporize a metal-nonmetal compound to generate a metal-nonmetal precursor gas. The laser device is configured to provide la...

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Main Authors HSU, FENG YUAN, CHANG, HSU-KAI, YANG, CHI-MING, HSU, CHING-HSIANG
Format Patent
LanguageEnglish
Published 06.02.2020
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Abstract A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device is configured to vaporize a metal-nonmetal compound to generate a metal-nonmetal precursor gas. The laser device is configured to provide laser light, and irradiate the metal-nonmetal precursor gas released from the vaporization device with the laser light to emit a light signal. The lens structure is configured to direct the light signal toward a photomask used in a lithography process.
AbstractList A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device is configured to vaporize a metal-nonmetal compound to generate a metal-nonmetal precursor gas. The laser device is configured to provide laser light, and irradiate the metal-nonmetal precursor gas released from the vaporization device with the laser light to emit a light signal. The lens structure is configured to direct the light signal toward a photomask used in a lithography process.
Author HSU, FENG YUAN
HSU, CHING-HSIANG
YANG, CHI-MING
CHANG, HSU-KAI
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Snippet A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device...
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ELECTRICITY
X-RAY TECHNIQUE
Title LIGHT GENERATION SYSTEM USING METAL-NONMETAL COMPOUND AS PRECURSOR AND RELATED LIGHT GENERATION METHOD
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