LIGHT GENERATION SYSTEM USING METAL-NONMETAL COMPOUND AS PRECURSOR AND RELATED LIGHT GENERATION METHOD
A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device is configured to vaporize a metal-nonmetal compound to generate a metal-nonmetal precursor gas. The laser device is configured to provide la...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
06.02.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A light generation system is provided. The light generation system includes a vaporization device, a laser device and a lens structure. The vaporization device is configured to vaporize a metal-nonmetal compound to generate a metal-nonmetal precursor gas. The laser device is configured to provide laser light, and irradiate the metal-nonmetal precursor gas released from the vaporization device with the laser light to emit a light signal. The lens structure is configured to direct the light signal toward a photomask used in a lithography process. |
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Bibliography: | Application Number: US201916439387 |