DEVICE BASED ON ALKALI METAL NIOBATE COMPRISING A BARRIER LAYER AND MANUFACTURING PROCESS

A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is ine...

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Bibliographic Details
Main Authors RODRIGUEZ, Guillaume, MOULIN, Cécile, HALIMAOUI, Aomar
Format Patent
LanguageEnglish
Published 06.02.2020
Subjects
ELECTRICITY
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Summary:A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is inert to the alkali metals of the niobite, the barrier material layer being located between the lower layer of metal and the upper layer of piezoelectric material. A process for producing the device is also provided.
Bibliography:Application Number: US201916528231