TESTING APPARATUS
A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
30.01.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position. |
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Bibliography: | Application Number: US201916298141 |