TESTING APPARATUS

A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes...

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Bibliographic Details
Main Authors FUJIWARA, Tomoko, Kaneda, Keiko, Tsumura, Michiko, Sueyama, Takao
Format Patent
LanguageEnglish
Published 30.01.2020
Subjects
CLEANING
CLEANING IN GENERAL
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PERFORMING OPERATIONS
PHYSICS
PREVENTION OF FOULING IN GENERAL
TESTING
TRANSPORTING
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Summary:A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position.
Bibliography:Application Number: US201916298141