METHOD FOR LOCALIZING ASSEMBLY ERRORS
A method localizes assembly errors during the arrangement and/or the assembly of in particular vibration-isolated structural elements, in particular of components of optical arrangements, preferably of microlithographic projection exposure apparatuses.
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
09.01.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A method localizes assembly errors during the arrangement and/or the assembly of in particular vibration-isolated structural elements, in particular of components of optical arrangements, preferably of microlithographic projection exposure apparatuses. |
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Bibliography: | Application Number: US201916575985 |