ELECTRODE UNIT HAVING AN INTERNAL ELECTRICAL NETWORK FOR SUPPLYING HIGH-FREQUENCY VOLTAGE, AND CARRIER ARRANGEMENT FOR A PLASMA TREATMENT SYSTEM

• Main Authors: SCHLEMM, Hermann, KEHR, Mirko, ANSORGE, Erik
• Format: Patent
• Language: English
• Published: 02.01.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention relates to an electrode unit comprising a plurality of plasma electrode pairs, which, at a specific applied voltage, are suitable for igniting a plasma between a first plasma electrode and a second plasma electrode of each plasma electrode pair; at least one internal electrical supply network that is suitable for supplying a first voltage to all the first plasma electrodes and to supply a second voltage to all the second plasma electrodes, at least one of the voltages being high frequency; and a first and a second connection terminal suitable for feeding the first voltage and the second voltage into the at least one supply network. The internal electrical supply network contains a plurality of lines, wherein by way of the arrangement, the geometric dimensions and/or the material of the lines, and/or the arrangement of a feed point of the first or second voltage within the supply network, the supply network is adapted to the electrode unit and the frequency of the first and/or the second voltage.