BULK ACOUSTIC WAVE RESONATOR HAVING OPENINGS IN AN ACTIVE AREA AND A PILLAR BENEATH THE OPENING

A bulk acoustic wave (BAW) resonator is disclosed. The BAW resonator includes: a lower electrode; a piezoelectric layer disposed over the lower electrode; and an upper electrode over the piezoelectric layer. An opening having a first area exists in and extends completely through the upper electrode....

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Bibliographic Details
Main Authors Feld, David Albert, Setoodeh, Sormeh, Kirkendall, Chris, Ivira, Brice, Yu, Pen Li
Format Patent
LanguageEnglish
Published 14.11.2019
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:A bulk acoustic wave (BAW) resonator is disclosed. The BAW resonator includes: a lower electrode; a piezoelectric layer disposed over the lower electrode; and an upper electrode over the piezoelectric layer. An opening having a first area exists in and extends completely through the upper electrode. The BAW resonator also includes a substrate disposed below the lower electrode; a cavity; and a pillar disposed in the cavity and extending to contact a portion of the lower electrode disposed beneath the opening. The pillar has a second area that is less than the first area. There are no electrical connections that extend across the opening from one side to another.
Bibliography:Application Number: US201916521640