SEMICONDUCTOR MANUFACTURING APPARATUS, WAFER CONVEYING APPARATUS AND WAFER CONVEYING METHOD

• Main Authors: AISO, Fumiki, Fujitsuka, Ryota, Takahashi, Kensei, Matsui, Takayuki, Iino, Tomohisa
• Format: Patent
• Language: English
• Published: 14.11.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

In one embodiment, a semiconductor manufacturing apparatus includes a container to contain wafers, and supporting tables provided in the container so as to be stacked on one another, and each including a supporting face that comes into contact with a wafer to support the wafer. The apparatus further...