ADAPTABLE-MODULAR OPTICAL SENSOR BASED PROCESS CONTROL SYSTEM, AND METHOD OF OPERATION THEREOF

A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an op...

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Bibliographic Details
Main Authors Lynes, Sean, Daignault, JR., Richard J, Gu, Zhiyong, Chen, Hong
Format Patent
LanguageEnglish
Published 05.09.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.
Bibliography:Application Number: US201815909265