NOVEL RESISTIVE RANDOM ACCESS MEMORY DEVICE
A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first diele...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
29.08.2019
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Subjects | |
Online Access | Get full text |
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Summary: | A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer. |
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Bibliography: | Application Number: US201815908601 |