Charged Particle Beam Device

Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and incre...

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Bibliographic Details
Main Authors ENOMOTO, Hirohisa, SUZUKI, Wataru
Format Patent
LanguageEnglish
Published 22.08.2019
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MEANS FOR DAMPING VIBRATION
MECHANICAL ENGINEERING
SHOCK-ABSORBERS
SPRINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and increase in weight of the support body is suppressed. The support body includes: a first member which supports a mounted object, and is supported by a vibration removing mount; second members which have a thickness different from that of the first member and arranged to overlap the first member; fixing members which fix the first member and the second members; and damping members which have rigidity lower than the fixing members and are deformed by a difference in variations between the first member and the second members.
Bibliography:Application Number: US201716313693