ELECTROSTATICALLY ACTUATED DEVICE
The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.
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Main Author | |
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Format | Patent |
Language | English |
Published |
22.08.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber. |
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Bibliography: | Application Number: US201716329599 |