MICROPHONE WITH INTEGRATED GAS SENSOR

Systems and apparatuses for a microelectromechanical system (MEMS) device. The MEMS device includes a housing, a transducer, and a sensor. The housing includes a substrate defining a port and a cover. The substrate and the cover cooperatively form an internal cavity. The port fluidly couples the int...

Full description

Saved in:
Bibliographic Details
Main Authors Watson, Josh, Chandrasekaran, Venkataraman, Szczech, John, Furst, Claus
Format Patent
LanguageEnglish
Published 27.06.2019
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:Systems and apparatuses for a microelectromechanical system (MEMS) device. The MEMS device includes a housing, a transducer, and a sensor. The housing includes a substrate defining a port and a cover. The substrate and the cover cooperatively form an internal cavity. The port fluidly couples the internal cavity to an external environment. The transducer is disposed within the internal cavity and positioned to receive acoustic energy through the port. The transducer is configured to convert the acoustic energy into an electrical signal. The sensor is disposed within the internal cavity and positioned to receive a gas through the port. The sensor is configured to facilitate detecting at least one of an offensive odor, smoke, a volatile organic compound, carbon monoxide, carbon dioxide, a nitrogen oxide, methane, and ozone.
Bibliography:Application Number: US201716312324