CHEMICAL SENSOR

A chemical sensor that enables high detection accuracy that includes a soft-magnetic-material film, a magnetoresistance-effect element, a first film disposed over the soft-magnetic-material film, and a second film disposed over the magnetoresistance-effect element, wherein, when viewed from a direct...

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Bibliographic Details
Main Authors TSUBOIKE, Sachio, KIKUKAWA, Takashi, YUGA, Haruki, HARATANI, Susumu, KITAGAWA, Sumiko
Format Patent
LanguageEnglish
Published 25.04.2019
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Summary:A chemical sensor that enables high detection accuracy that includes a soft-magnetic-material film, a magnetoresistance-effect element, a first film disposed over the soft-magnetic-material film, and a second film disposed over the magnetoresistance-effect element, wherein, when viewed from a direction perpendicular to the film surface of the soft-magnetic-material film, the soft-magnetic-material film is disposed at least partially so as not to overlap the magnetoresistance-effect element; when viewed from the direction perpendicular to the film surface of the soft-magnetic-material film, the magnetoresistance-effect element is disposed at least partially so as not to overlap the soft-magnetic-material film; and the second film has higher solubility in a specific liquid than the first film.
Bibliography:Application Number: US201716087833