MEMS SWITCH AND ELECTRONIC DEVICE

A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second sign...

Full description

Saved in:
Bibliographic Details
Main Authors AKIYAMA, Jotaro, OSANAI, Katsunori, INOUE, Tohru, ENDOU, Kenji, AOYAGI, Takashi
Format Patent
LanguageEnglish
Published 14.03.2019
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.
Bibliography:Application Number: US201615255757