ENHANCING DIE FLATNESS

Methods and apparatus for enhancing the flatness of a die by applying adhesive to a shim having a selected flatness, rotating the shim to spread the adhesive to a layer having a uniform thickness, evacuating a chamber to create a vacuum; manipulating a die onto the adhesive layer in the chamber; and...

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Bibliographic Details
Main Authors Harris, Sean F, Cahill, Andrew, Lofgreen, Daniel D
Format Patent
LanguageEnglish
Published 28.02.2019
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Summary:Methods and apparatus for enhancing the flatness of a die by applying adhesive to a shim having a selected flatness, rotating the shim to spread the adhesive to a layer having a uniform thickness, evacuating a chamber to create a vacuum; manipulating a die onto the adhesive layer in the chamber; and reducing a level of the vacuum to pressure the die onto the adhesive layer such that the bow in the die is reduced as the die conforms to the shim.
Bibliography:Application Number: US201715827220