RAMAN SPECTRUM INSPECTION APPARATUS
A Raman spectrum inspection apparatus is provided, including: a exciting light source configured to emit an exciting light to a sample to be inspected; an optical device configured to collect an optical signal from a position, which is irradiated by the exciting light, of the sample to be inspected;...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
31.01.2019
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Subjects | |
Online Access | Get full text |
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Summary: | A Raman spectrum inspection apparatus is provided, including: a exciting light source configured to emit an exciting light to a sample to be inspected; an optical device configured to collect an optical signal from a position, which is irradiated by the exciting light, of the sample to be inspected; and a spectrometer configured to generate a Raman spectrum of the sample to be inspected from the received optical signal, wherein an excitation optical path in which the exciting light passes from the exciting light device to the sample to be inspected and a detection optical path in which the optical signal received by the spectrometer passes from the sample to be inspected to the spectrometer are separated from each other. |
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Bibliography: | Application Number: US201816043900 |