METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING

Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided...

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Bibliographic Details
Main Authors GURUSAMY, Jay, KAN, Wai- Ming, OH, Jeonghoon, LISCHKA, David J, TOLLES, Robert D, RONDUM, Erik, ZUNIGA, Steven M, REEDY, Steven M
Format Patent
LanguageEnglish
Published 31.01.2019
Subjects
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
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Summary:Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided. The method comprises advancing a polishing material across a surface of a platen. The polishing material has a polishing surface and an opposing backside surface and the backside surface has a pattern of identifying features formed thereon. The method further comprises sensing the movement of the pattern of identifying features past a detector assembly. The method further comprises controlling a position of the polishing material relative to the platen based on data received from the sensed movement of the pattern of identifying features.
Bibliography:Application Number: US201816037783