CHARGED PARTICLE DETECTOR, CHARGED PARTICLE BEAM DEVICE, AND MASS SPECTROMETER
The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the pres...
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Format | Patent |
Language | English |
Published |
24.01.2019
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Abstract | The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device. |
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AbstractList | The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device. |
Author | OHSHIMA, Takashi IMAMURA, Shin TSUCHIYA, Tomonobu KAWANO, Hajime SUZUKI, Makoto |
Author_xml | – fullname: OHSHIMA, Takashi – fullname: KAWANO, Hajime – fullname: IMAMURA, Shin – fullname: TSUCHIYA, Tomonobu – fullname: SUZUKI, Makoto |
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RelatedCompanies | HITACHI HIGH-TECHNOLOGIES CORPORATION |
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Snippet | The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS TESTING |
Title | CHARGED PARTICLE DETECTOR, CHARGED PARTICLE BEAM DEVICE, AND MASS SPECTROMETER |
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