CHARGED PARTICLE DETECTOR, CHARGED PARTICLE BEAM DEVICE, AND MASS SPECTROMETER

The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the pres...

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Bibliographic Details
Main Authors OHSHIMA, Takashi, KAWANO, Hajime, IMAMURA, Shin, TSUCHIYA, Tomonobu, SUZUKI, Makoto
Format Patent
LanguageEnglish
Published 24.01.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
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Summary:The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.
Bibliography:Application Number: US201716070790