HIGHLY EFFICIENT DATA REPRESENTATION OF DENSE POLYGONAL STRUCTURES

A method of generating a layout data file for a metasurface device is disclosed. At a radial position of a metasurface device, the method determines a primitive cell of a first level having a metasurface feature pattern that is repeated around an arc corresponding to a circumference at the radial po...

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Bibliographic Details
Main Authors ZHANG, Shuyan, CAPASSO, Federico, SHE, Alan Jenting
Format Patent
LanguageEnglish
Published 24.01.2019
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Summary:A method of generating a layout data file for a metasurface device is disclosed. At a radial position of a metasurface device, the method determines a primitive cell of a first level having a metasurface feature pattern that is repeated around an arc corresponding to a circumference at the radial position. The method generates metasurface structures of higher levels. Each metasurface structure of a higher level includes multiple references to a structure or a primitive cell of a next lower level. The method stores at least a portion of a layout of the metasurface device to a layout data file. The layout includes references to metasurface structures of two or more of the higher levels.
Bibliography:Application Number: US201816040363