HIGHLY EFFICIENT DATA REPRESENTATION OF DENSE POLYGONAL STRUCTURES
A method of generating a layout data file for a metasurface device is disclosed. At a radial position of a metasurface device, the method determines a primitive cell of a first level having a metasurface feature pattern that is repeated around an arc corresponding to a circumference at the radial po...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.01.2019
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Subjects | |
Online Access | Get full text |
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Summary: | A method of generating a layout data file for a metasurface device is disclosed. At a radial position of a metasurface device, the method determines a primitive cell of a first level having a metasurface feature pattern that is repeated around an arc corresponding to a circumference at the radial position. The method generates metasurface structures of higher levels. Each metasurface structure of a higher level includes multiple references to a structure or a primitive cell of a next lower level. The method stores at least a portion of a layout of the metasurface device to a layout data file. The layout includes references to metasurface structures of two or more of the higher levels. |
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Bibliography: | Application Number: US201816040363 |