FLEXIBLE, HERMETIC ELECTRICAL INTERCONNECT FOR ELECTRONIC AND OPTOELECTRONIC DEVICES FOR IN VIVO USE

• Main Authors: Mattes, Michael F, Zielke, Mark A
• Format: Patent
• Language: English
• Published: 20.12.2018
• Subjects: BANDAGES, DRESSINGS OR ABSORBENT PADS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CONTACT LENSES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF,TUBULAR STRUCTURES OF THE BODY, E.G. STENTS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROTHERAPY; FILTERS IMPLANTABLE INTO BLOOD VESSELS; FIRST-AID KITS; FOMENTATION; HUMAN NECESSITIES; HYGIENE; MAGNETOTHERAPY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MEDICAL OR VETERINARY SCIENCE; OPTICS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; PERFORMING OPERATIONS; PHYSICS; PRINTED CIRCUITS; PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE; PROSTHESES; RADIATION THERAPY; SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURESAS SPECTACLES; TRANSPORTING; TREATMENT OR PROTECTION OF EYES OR EARS; ULTRASOUND THERAPY; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

An electronic device can comprise a first electronic module; a second electronic module; and a hermetic electric interconnect to hermetically couple them. The hermetic electric interconnect can comprise a bottom metal layer; a bottom insulating layer, deposited on the bottom metal layer to insulate the bottom metal layer; an interconnect metal layer, deposited on the bottom insulating layer, and deposited to form a bottom sealing ring; and patterned to form electrical connections between contact pads, and to form a middle sealing ring; a patterned top insulating layer, deposited on the interconnect metal layer to insulate the interconnect metal layer; and patterned to form feedthrough holes; and a top metal layer, deposited on the top insulating layer to start forming contacts by filling the feedthrough holes; and patterned to complete forming contacts through the feedthrough holes, to form a separate barrier layer, and to complete forming the top sealing ring.