MEMBRANE-BASED THERMAL FLOW SENSOR DEVICE

A membrane-based thermal flow sensor device with a substrate comprising a cavity, a membrane spanning said cavity and defining a first membrane side and a second membrane side, and a sensitive structure. The sensitive structure is arranged on the membrane and comprises a heater element and a tempera...

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Bibliographic Details
Main Author HORNUNG, Mark
Format Patent
LanguageEnglish
Published 25.10.2018
Subjects
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
TESTING
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Summary:A membrane-based thermal flow sensor device with a substrate comprising a cavity, a membrane spanning said cavity and defining a first membrane side and a second membrane side, and a sensitive structure. The sensitive structure is arranged on the membrane and comprises a heater element and a temperature element. The heater element and the temperature element are spaced apart from one another across a first portion of said the membrane. The membrane is provided with one or more through-openings such as to establish a fluid communication between said first and second membrane sides. Furthermore, said one or more through-openings are arranged outside said first portion of said membrane. The present invention also relates to a method of fabrication and to a method of use of said sensor device.
Bibliography:Application Number: US201815956433