MEMBRANE-BASED THERMAL FLOW SENSOR DEVICE
A membrane-based thermal flow sensor device with a substrate comprising a cavity, a membrane spanning said cavity and defining a first membrane side and a second membrane side, and a sensitive structure. The sensitive structure is arranged on the membrane and comprises a heater element and a tempera...
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Main Author | |
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Format | Patent |
Language | English |
Published |
25.10.2018
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Subjects | |
Online Access | Get full text |
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Summary: | A membrane-based thermal flow sensor device with a substrate comprising a cavity, a membrane spanning said cavity and defining a first membrane side and a second membrane side, and a sensitive structure. The sensitive structure is arranged on the membrane and comprises a heater element and a temperature element. The heater element and the temperature element are spaced apart from one another across a first portion of said the membrane. The membrane is provided with one or more through-openings such as to establish a fluid communication between said first and second membrane sides. Furthermore, said one or more through-openings are arranged outside said first portion of said membrane. The present invention also relates to a method of fabrication and to a method of use of said sensor device. |
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Bibliography: | Application Number: US201815956433 |