APPARATUS WITH A HIGH HEAT CAPACITY AND METHOD FOR PRODUCING THE SAME

The present disclosure relates to an apparatus comprising a substrate, wherein a MEMS module is arranged on a first side of the substrate, the output signal from said MEMS module changing in the event of a change in temperature. Furthermore, the apparatus has a housing structure which is arranged on...

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Bibliographic Details
Main Authors Steiert, Matthias, Goller, Bernd
Format Patent
LanguageEnglish
Published 25.10.2018
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Summary:The present disclosure relates to an apparatus comprising a substrate, wherein a MEMS module is arranged on a first side of the substrate, the output signal from said MEMS module changing in the event of a change in temperature. Furthermore, the apparatus has a housing structure which is arranged on a first side of the substrate and has a recess in which the MEMS module is arranged. The apparatus also has a layer which is applied to the housing structure and increases the heat capacity of the apparatus. The present disclosure also relates to a method for producing an apparatus of this kind.
Bibliography:Application Number: US201815957349