Methods Of Forming An Array Of Elevationally-Extending Strings Of Memory Cells Comprising A Programmable Charge Storage Transistor And Arrays Of Elevationally-Extending Strings Of Memory Cells Comprising A Programmable Charge Storage Transistor

• Main Authors: Carter, Chet E, Dorhout, Justin B, Shamanna, Vinayak, Meyer, Ryan, Park, Matthew, Greeley, Joseph Neil, Chary, Indra V, Parekh, Kunal R, Tessariol, Paolo, Roberts, Martin C
• Format: Patent
• Language: English
• Published: 04.10.2018
• Subjects: ELECTRICITY

An array of elevationally-extending strings of memory cells, where the memory cells individually comprise a programmable charge storage transistor, comprises a substrate comprising a first region containing memory cells and a second region not containing memory cells laterally of the first region. The first region comprises vertically-alternating tiers of insulative material and control gate material. The second region comprises vertically-alternating tiers of different composition insulating materials laterally of the first region. A channel pillar comprising semiconductive channel material extends elevationally through multiple of the vertically-alternating tiers within the first region. Tunnel insulator, programmable charge storage material, and control gate blocking insulator are between the channel pillar and the control gate material of individual of the tiers of the control gate material within the first region. Conductive vias extend elevationally through the vertically-alternating tiers in the second region. An elevationally-extending wall is laterally between the first and second regions. The wall comprises the programmable charge storage material and the semiconductive channel material. Other embodiments and aspects, including method, are disclosed.