METHOD OF FORMING SERPENTINE RESISTOR

A method of forming a serpentine resistor includes: setting a total length of a schematic resistor to make the schematic resistor to have a first resistance according to a sheet resistance; forming, by using a processor, a serpentine layer corresponding to the schematic resistor, forming, by using t...

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Bibliographic Details
Main Authors CHENG, HSIN-LI, LO, WEN-SHUN
Format Patent
LanguageEnglish
Published 04.10.2018
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRICITY
PHYSICS
RESISTORS
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Summary:A method of forming a serpentine resistor includes: setting a total length of a schematic resistor to make the schematic resistor to have a first resistance according to a sheet resistance; forming, by using a processor, a serpentine layer corresponding to the schematic resistor, forming, by using the processor, a dummy layer over a portion of the serpentine layer to form a modified serpentine layer, measuring, by using the processor, a modified length of the modified serpentine layer, and comparing, by using the processor, the total length and the modified length to generate a comparison result.
Bibliography:Application Number: US201715471433