MEMS SOUND TRANSDUCER WITH CLOSED CONTROL SYSTEM

• Main Authors: BOTTONI, FERRUCCIO, CLERICI, ANDREA RUSCONI
• Format: Patent
• Language: English
• Published: 16.08.2018
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

The invention relates to a MEMS sound transducer, in particular a MEMS loudspeaker and/or a MEMS microphone, for generating and/or detecting sound waves in the audible wavelength spectrum, with a support element (9), a membrane (2) deflectable with respect to the support element (9) along a z-axis, at least one piezoelectric actuator (7) supported on the support element (9) for deflecting the membrane (2) and one electronic control unit (11) for driving the actuator (7). In accordance with the invention, the MEMS sound transducer features at least one position sensor (19), by means of which the control unit (11) can provide a sensor signal (37) that is dependent on the membrane deflection. Furthermore, the control unit (11) is designed such that, for the functional self-test, for distortion reduction, for damage protection and/or for the compensation of behavioral changes, the sensor signal can be analyzed and/or can be reconciled with a reference signal (8) stored in the control unit (11), and that the actuator (7) can be driven in a controlled manner by taking into account the analysis result (35) and/or the comparison result (34).