WAFER CARRIER HAVING A DOOR WITH A UNITARY BODY

A front opening wafer carrier includes: a container portion. The container portion includes a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a door removably received in the door frame for closing the...

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Bibliographic Details
Main Authors Bandreddi, Murali, Fuller, Matthew A
Format Patent
LanguageEnglish
Published 21.06.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A front opening wafer carrier includes: a container portion. The container portion includes a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a door removably received in the door frame for closing the front opening. The door has a single body construction and a substantially smooth exterior surface including one or more automation interface receiving features having a minimal volume, which may minimize the amount of oxygen that can be trapped between the wafer carrier door and an equipment front end module when the wafer carrier is in use.
Bibliography:Application Number: US201615736411