TARGET STORAGE DEVICE

A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected wi...

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Bibliographic Details
Main Authors SHIRAISHI, Yutaka, ISHII, Takuya, HIRASHITA, Toshiyuki, NISHISAKA, Toshihiro
Format Patent
LanguageEnglish
Published 07.06.2018
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Summary:A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.
Bibliography:Application Number: US201815888111