ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT
A roll to roll fabrication apparatus includes: a vacuum chamber having an installation chamber and a process chamber; a preprocessing unit in the installation chamber to process a surface of a film which is transferred to enhance a film characteristic in a subsequent CVD process; a process drum in t...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
31.05.2018
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Subjects | |
Online Access | Get full text |
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Summary: | A roll to roll fabrication apparatus includes: a vacuum chamber having an installation chamber and a process chamber; a preprocessing unit in the installation chamber to process a surface of a film which is transferred to enhance a film characteristic in a subsequent CVD process; a process drum in the process chamber to wind the film thereon; a process treatment unit in the process chamber to form a layer by performing a CVD process on the film wound on the process drum; and a plurality of heaters in the installation chamber and the process chamber to gradually increase a temperature of the film wound on the process drum to prevent application of a thermal impact to the film due to the high-temperature process drum. |
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Bibliography: | Application Number: US201715812767 |