High Aspect Ratio Electroplated Structures And Anisotropic Electroplating Processes

Devices including high-aspect ratio electroplated structures and methods of forming high-aspect ratio electroplated structures are described. A method for manufacturing metal structures includes providing a substrate having a metal base characterized by a height to width aspect ratio A/B and electro...

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Bibliographic Details
Main Authors Swanson, Kurt C, Riemer, Douglas P, Ladwig, Peter F
Format Patent
LanguageEnglish
Published 24.05.2018
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Summary:Devices including high-aspect ratio electroplated structures and methods of forming high-aspect ratio electroplated structures are described. A method for manufacturing metal structures includes providing a substrate having a metal base characterized by a height to width aspect ratio A/B and electroplating a metal crown on the base to form the metal structure with a height to width aspect ratio A/S greater than the aspect ratio A/B of the base.
Bibliography:Application Number: US201715817049