High Aspect Ratio Electroplated Structures And Anisotropic Electroplating Processes
Devices including high-aspect ratio electroplated structures and methods of forming high-aspect ratio electroplated structures are described. A method for manufacturing metal structures includes providing a substrate having a metal base characterized by a height to width aspect ratio A/B and electro...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.05.2018
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Subjects | |
Online Access | Get full text |
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Summary: | Devices including high-aspect ratio electroplated structures and methods of forming high-aspect ratio electroplated structures are described. A method for manufacturing metal structures includes providing a substrate having a metal base characterized by a height to width aspect ratio A/B and electroplating a metal crown on the base to form the metal structure with a height to width aspect ratio A/S greater than the aspect ratio A/B of the base. |
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Bibliography: | Application Number: US201715817049 |