METHOD FOR ACTIVATING AN ACTUATOR UNIT AND MICROMECHANICAL DEVICE

A method for activating a deflectable micromechanical actuator unit, in particular a micromirror. A periodic setpoint deflection profile of a deflection of the actuator unit is predefined at a predefined period duration. The actuator unit is periodically activated based on an activation signal accor...

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Bibliographic Details
Main Author Buhmann, Alexander
Format Patent
LanguageEnglish
Published 10.05.2018
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Summary:A method for activating a deflectable micromechanical actuator unit, in particular a micromirror. A periodic setpoint deflection profile of a deflection of the actuator unit is predefined at a predefined period duration. The actuator unit is periodically activated based on an activation signal according to the predefined period duration. A deflection profile of the deflection of the actuator unit is measured during at least one activation period. The activation signal is adapted for at least one of the following activation periods based on the setpoint deflection profile and on the measured deflection profile.
Bibliography:Application Number: US201715803056