MANUFACTURING METHOD OF NICKEL WIRING
There is provided a method for manufacturing Ni wiring. The method includes forming an Ni film on a surface of a substrate having a recess formed thereon by CVD or ALD by using an Ni compound as a film forming material and NH3gas and H2 gas as reduction gases to partially fill the recess. The method...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
29.03.2018
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Subjects | |
Online Access | Get full text |
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