MANUFACTURING METHOD OF NICKEL WIRING

• Main Authors: KAWASAKI Hiroaki, NAGAI Hiroyuki, MATSUMOTO Takashi, IFUKU Ryota
• Format: Patent
• Language: English
• Published: 29.03.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

There is provided a method for manufacturing Ni wiring. The method includes forming an Ni film on a surface of a substrate having a recess formed thereon by CVD or ALD by using an Ni compound as a film forming material and NH3gas and H2 gas as reduction gases to partially fill the recess. The method...