PROTECTION SCHEMES FOR MEMS SWITCH DEVICES

• Main Authors: Fitzgerald Padraig Liam, Salcedo Javier A, Parthasarathy Srivatsan
• Format: Patent
• Language: English
• Published: 22.03.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS; EMERGENCY PROTECTIVE DEVICES; GENERATION; RELAYS; SELECTORS; SEMICONDUCTOR DEVICES

Micro-electromechanical switch (MEMS) devices can be fabricated using integrated circuit fabrication techniques and materials. Such switch devices can provide cycle life and insertion loss performance suiting for use in a broad range of applications including, for example, automated test equipment (...