PROTECTION SCHEMES FOR MEMS SWITCH DEVICES

Micro-electromechanical switch (MEMS) devices can be fabricated using integrated circuit fabrication techniques and materials. Such switch devices can provide cycle life and insertion loss performance suiting for use in a broad range of applications including, for example, automated test equipment (...

Full description

Saved in:
Bibliographic Details
Main Authors Fitzgerald Padraig Liam, Salcedo Javier A, Parthasarathy Srivatsan
Format Patent
LanguageEnglish
Published 22.03.2018
Subjects
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
EMERGENCY PROTECTIVE DEVICES
GENERATION
RELAYS
SELECTORS
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:Micro-electromechanical switch (MEMS) devices can be fabricated using integrated circuit fabrication techniques and materials. Such switch devices can provide cycle life and insertion loss performance suiting for use in a broad range of applications including, for example, automated test equipment (ATE), switching for measurement instrumentation (such as a spectrum analyzer, network analyzer, or communication test system), and uses in communication systems, such as for signal processing. MEMS devices can be vulnerable to electrical over-stress, such as associated with electrostatic discharge (ESD) transient events. A solid-state clamp circuit can be incorporated in a MEMS device package to protect one or more MEMS devices from damaging overvoltage conditions. The clamp circuit can include single or multiple blocking junction structures having complementary current-voltage relationships, such as to help linearize a capacitance-to-voltage relationship presented by the clamp circuit.
Bibliography:Application Number: US201615269086