COMPOSITION ANALYSIS METHOD AND COMPOSITION ANALYSIS SYSTEM

A composition analysis method includes iteratively irradiating a sample with an ion beam, irradiating a specific portion of the sample that is thinned by the irradiation of the ion beam with an electron beam, and detecting an intensity of an X-ray generated from the sample by the irradiation of the...

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Bibliographic Details
Main Author TAKENO Shiro
Format Patent
LanguageEnglish
Published 22.03.2018
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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