MEMS SWITCH
Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
01.02.2018
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Subjects | |
Online Access | Get full text |
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Summary: | Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off. |
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Bibliography: | Application Number: US201715663628 |