PRESSURE CONTROL DEVICE

• Main Authors: Nozawa Takahiro, Nakamura Takeshi
• Format: Patent
• Language: English
• Published: 07.12.2017
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

A pressure control device maintains a pressure within a target of pressure control at a set pressure. The pressure control device includes a correction circuit that corrects a pressure signal, which represents the pressure within the target of pressure control that is detected by a pressure sensor, such that the pressure signal approaches a set pressure signal representing the set pressure; a comparison circuit that compares the corrected pressure signal with the set pressure signal; and a valve drive circuit that controls an opening and closing of a flow control valve based on a comparison result from the comparison circuit. The correction circuit is a filter circuit. The frequency characteristic of the filter circuit has a peak at a prescribed frequency, and corrects the pressure signal so as to raise a component of the prescribed frequency of the pressure signal.