PURIFICATION OF CHLOROSILANES BY MEANS OF DISTILLATION AND ADSORPTION

• Main Authors: AIGNER Maximilian, PROCHASKA Jan, PAETZOLD Uwe
• Format: Patent
• Language: English
• Published: 19.10.2017
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

Separation of chlorosilane mixtures containing boron, arsenic, and/or phosphorus impurities is facilitated by a distillative separation using at least one divided column, with recycle streams to a first column being passed through an external absorbent for the impurities.