PURIFICATION OF CHLOROSILANES BY MEANS OF DISTILLATION AND ADSORPTION

Separation of chlorosilane mixtures containing boron, arsenic, and/or phosphorus impurities is facilitated by a distillative separation using at least one divided column, with recycle streams to a first column being passed through an external absorbent for the impurities.

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Bibliographic Details
Main Authors AIGNER Maximilian, PROCHASKA Jan, PAETZOLD Uwe
Format Patent
LanguageEnglish
Published 19.10.2017
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Summary:Separation of chlorosilane mixtures containing boron, arsenic, and/or phosphorus impurities is facilitated by a distillative separation using at least one divided column, with recycle streams to a first column being passed through an external absorbent for the impurities.
Bibliography:Application Number: US201515517080