OBSERVATION APPARATUS, MEASUREMENT SYSTEM AND OBSERVATION METHOD

An observation apparatus includes an imaging unit, a driving mechanism and a control unit. The imaging unit takes images of a target object. The driving mechanism moves the imaging unit to change an observation position of the target object. The control unit controls the driving mechanism and the im...

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Bibliographic Details
Main Authors NONAKA Osamu, AMINO Hiroki, AOTA Koji, KAWAGUCHI Katsuhisa
Format Patent
LanguageEnglish
Published 07.09.2017
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
HANDLING RECORD CARRIERS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
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Summary:An observation apparatus includes an imaging unit, a driving mechanism and a control unit. The imaging unit takes images of a target object. The driving mechanism moves the imaging unit to change an observation position of the target object. The control unit controls the driving mechanism and the imaging unit while switching between a first mode in which the imaging unit takes images while simultaneously being moved at a high speed by the driving mechanism, and a second mode in which the imaging unit takes images having a higher resolution than the images taken in the first mode while simultaneously being moved at a speed lower than that of the first mode.
Bibliography:Application Number: US201715435113